Unveiling the Core Components: A Guide to Vacuum Pumps in PVD Coating System

Vacuum systems are the heart of Physical Vapor Deposition (PVD) coating machines, enabling precise thin-film deposition on substrates like hardware, tools, and decorative items. The performance of these systems hinges on two critical stages: low vacuum (roughing) and high vacuum (process). Here, we break down the configuration of PVD vacuum pumps and highlight industry-leading brands.

1. Low Vacuum Pumps: Foundation of the Process

Low vacuum pumps create the initial pressure reduction from atmospheric levels (typically to ~10⁻² Pa). They are essential for preparing the chamber for high-vacuum operation. Common types include:

• Oil-Sealed Rotary Vane Pumps: Ideal for general-purpose applications, such as drying, degassing, and initial evacuation.

  • Example: ULVAC’s PVD Series .

    • Compact, belt-driven design with quiet operation.

    • Models like PVD-360 achieve exhaust speeds of 19 m³/h (50 Hz) and ultimate pressures ≤0.67 Pa.

• Dry (Oil-Free) Pumps: Prevent hydrocarbon contamination, critical for clean processes like optical or semiconductor coatings.

  • Example: Oerlikon Leybold’s DRYVAC , which uses screw technology for minimal maintenance.

Applications in Hardware/Furniture Coating: Low vacuum pumps ensure rapid cycle times for Coating Machine For Hardware Furniture Industry, where efficiency and cleanliness are paramount.

2. High Vacuum Pumps: Achieving Process Precision

High vacuum pumps maintain ultra-low pressures (≤10⁻⁵ Pa) for vaporized particles to travel unimpeded. Key technologies include:

• Turbomolecular Pumps: Oil-free, high-speed pumps for contamination-sensitive processes.

  • Example: Oerlikon Leybold’s TURBOVAC MAGiNTEGRA  with magnetic levitation bearings, allowing arbitrary installation angles and minimal vibration.

• Cryogenic Pumps: Capture gases via condensation, achieving pressures down to 10⁻⁸ Torr (e.g., Kurt J. Lesker’s PRO Line PVD 200 ).

• Diffusion Pumps: Cost-effective for large-scale systems but require backing pumps.

Integration in PVD Systems: High vacuum pumps are critical for PVD Multiarc Ion Sputtering Coating Machine, where uniform adhesion and high-density films are required.

3. Recommended PVD Systems and Brands

• ZJ Large Diameter Multiarc Ion Coating Machine :

  • Configured with rotary vane pumps (e.g., 2X-30/2X-70) and diffusion pumps (K-500T).

  • Supports large-scale tooling or automotive components.

• Modular Coating Equipment (e.g., Kurt J. Lesker’s PRO Line ):

  • Combines dry scroll pumps (e.g., Edwards) and cryogenic pumps for R&D or low-volume production.

• Oerlikon Leybold’s UNIVEX Series :

  • Customizable for R&D, featuring magnetron sputtering and thermal evaporation sources.

4. Why Choose Our Coating Equipment?

Our PVD Multiarc Ion Sputtering Coating Machine and Coating Machine For Hardware Furniture Industry solutions integrate:

• Reliable Pump Stacking: Pairing robust low-vacuum pumps (e.g., ULVAC VD Series ) with high-vacuum turbomolecular pumps.

• Versatility: Handle materials from metals (Cr, Ti) to non-metals (MoO₃) .

• Automation: PLC-controlled systems for repeatability in hardware/furniture coatings.

Conclusion

From low-vacuum rotary vane pumps to high-vacuum turbomolecular systems, the right pump configuration ensures optimal performance for ZJ Large Diameter Multiarc Ion Coating Machine and furniture-focused Coating Equipment. Partner with us to tailor a PVD system that balances speed, precision, and cost-effectiveness.